It is reported that ASML will launch a "special version" DUV lithography machine to China.
CTOnews.com, July 6, according to DigiTimes, ASML is trying to circumvent the new Dutch sales license ban by launching a special edition of DUV lithography machines for the Chinese market.
Sources said that if the project continues, SMIC, Huahong and other Chinese semiconductor companies can continue to use Dutch equipment to produce 28nm and more mature chips.
Tu Yuan ASML sources said that the special edition DUV lithography machine is based on the transformation of the Twinscan NXT: 1980Di lithography system, while the 1980Di is an old model launched 10 years ago and is not covered by the official ban.
1980Di is an existing lithography machine with low efficiency of ASML, which supports NA 1.35optics and can achieve resolution.
